Comparative Study of Cu Precursors for 3D Focused Electron Beam Induced Deposition-Reference-Cited by-同舟云学术

Comparative Study of Cu Precursors for 3D Focused Electron Beam Induced Deposition

Published:2004 Issue:8 Volume:151 Page:C535
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Luisier A.,Utke I.,Bret T.,Cicoira F.,Hauert R.,Rhee S.-W.,Doppelt P.,Hoffmann P.

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference23 articles.

1. Novel high resolution scanning thermal probe

2. Fabrication and actuation of customized nanotweezers with a 25 nm gap

3. Conductive dots, wires, and supertips for field electron emitters produced by electron-beam induced deposition on samples having increased temperature

4. Fabrication of field emitter array using focused ion and electron beam induced reaction

5. High-resolution magnetic Co supertips grown by a focused electron beam

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