Current Understanding of BEOL TDDB Lifetime Models

Author:

Croes K.,Wu C.,Kocaay D.,Li Y.,Roussel Ph.,Bömmels J.,Tőkei Zs.

Publisher

The Electrochemical Society

Subject

Electronic, Optical and Magnetic Materials

Reference43 articles.

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2. Ogawa E. T. Kim J. Haase G. S. Mogul H. C. McPherson J. W. , “Leakage, breakdown and TDDB characteristics of porous low-k silica-based interconnect dielectrics,” IEEE Int. Reliability Physics Symposium (IRPS), p. 3B.1, 2003.

3. Electron fluence driven, Cu catalyzed, interface breakdown mechanism for BEOL low-k time dependent dielectric breakdown

4. Lee S. C. Oates A. S. Chang K. M. “ Fundamental understanding of porous low-k dielectric breakdown,” IEEE Int. Reliability Physics Symposium (IRPS), p. 481, 2009.

5. Barbarin Y. Croes K. Roussel Ph. Li Y. Zhao L. Verdonck P. Baklanov M. Tőkei Zs. , “Reliability Characteristics Of Thin Porous Low-K Silica-Based Interconnect Dielectrics,” IEEE Int. Reliability Physics Symposium (IRPS), p. 2F.3, 2013.

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