Publisher
The Electrochemical Society
Subject
Electronic, Optical and Magnetic Materials
Reference31 articles.
1. Babu S. V. , Advances in Chemical Mechanical Planarization (CMP), Woodhead Publishing (2016).
2. B. Roberts Available from: http://www.avsusergroups.org/cmpug_pdfs/CMP2014_Techcet_Roberts.pdf.
3. Slurry Utilization Efficiency Studies in Chemical Mechanical Planarization
4. Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization
5. Mok P. , U.S. Pat. 5964413 (1999).
Cited by
5 articles.
订阅此论文施引文献
订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献