Author:
Hackett W. H.,McGahan T. E.,Dixon R. W.,Kammlott G. W.
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
10 articles.
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1. MEMS Wet-Etch Processes and Procedures;MEMS Reference Shelf;2011
2. Dry etching of GaP with emphasis on selective etching over AlGaP;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2002
3. GaP/Si Heterojunction with Ohmic Conduction Fabricated by Wafer Fusion Technique;Japanese Journal of Applied Physics;2000-09-15
4. References;Thin Films by Chemical Vapour Deposition;1990
5. Chemical Etching;Thin Film Processes;1978