MSA as a Supporting Electrolyte in Copper Electroplating for Filling of Damascene Trenches and Through Silicon Vias

Author:

Ki Cho Sung,Jun Kim Myung,Jeong Kim Jae

Publisher

The Electrochemical Society

Subject

Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering

Reference29 articles.

1. J. S. Newman , Electrochemical Systems , 2nd ed., p. 331, Prentice-Hall, Englewood Cliffs, New Jersey (1991).

2. Copper Electrodeposition: Principles and Recent Progress

3. J. W. Dini , in Modern Electroplating , M. Schlesinger and M. Paunovic , Editors, 4th ed., p. 61, John Wiley & Sons, New York (2000).

4. Q. Li, H. Ling, H. Cao, Z. Bian, M. Li, and D. Mao , in Proceedings of the International Conference on Electronic Packaging Technology and High Density Packaging , p. 68, IEEE, New York (2009).

5. J. Reid , Abstract 1992, The Electrochemical Society Meeting Abstracts , Vol. 2010, Las Vegas, NV, Oct 10–15, 2010.

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