Affiliation:
1. Bell Laboratories, Murray Hill, New Jersey 07974
Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
19 articles.
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1. Iron contamination in silicon technology;Applied Physics A: Materials Science & Processing;2000-05-01
2. Diffusion;Fundamentals of Semiconductor Processing Technology;1995
3. An IC-compatible detector process;IEEE Transactions on Nuclear Science;1989-02
4. An introduction to gold gettering in silicon;Gold Bulletin;1987-09
5. Impurity Profiling in Mixed Diffusion by Neutron Activation Analysis;Journal of The Electrochemical Society;1986-12-01