Author:
Nabatame Toshihide,Maeda Erika,Inoue Mari,Hirose Masafumi,Ochi Ryota,Sawada Tomomi,Irokawa Yoshihiro,Hashizume Tamotsu,Shiozaki Koji,Onaya Takashi,Tsukagoshi Kazuhito,Koide Yasuo
Publisher
The Electrochemical Society
Cited by
2 articles.
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1. Investigation of Metal Oxide Film by Atomic Layer Deposition for Electronic Device;Journal of The Surface Finishing Society of Japan;2023-03-01
2. Innovative RF Device Technologies for Advanced Information and Communications Network Society;2022 IEEE BiCMOS and Compound Semiconductor Integrated Circuits and Technology Symposium (BCICTS);2022-10-16