Publisher
The Electrochemical Society
Subject
Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials
Cited by
29 articles.
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1. Chapter 9 Epitaxy on patterned wafers;Semiconductors and Semimetals;2001
2. Silicon Epitaxial Layers: Defects;Encyclopedia of Materials: Science and Technology;2001
3. Silicon Epitaxy by Chemical Vapor Deposition;Handbook of Thin Film Deposition Processes and Techniques;2001
4. The effect of orientation deviation on pattern distortion in epitaxial buried layer on p-type 〈100〉 silicon substrate;Journal of Crystal Growth;1998-07
5. Thin Film Deposition;Fundamentals of Semiconductor Processing Technology;1995