(Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration-Reference-Cited by-同舟云学术

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(Invited) Very Low Temperature Epitaxy of Group-IV Semiconductors for Use in FinFET, Stacked Nanowires and Monolithic 3D Integration

Published:2018-07-20 Issue:7 Volume:86 Page:163-175
ISSN:1938-6737
Container-title:ECS Transactions
language:en
Short-container-title:ECS Trans.

Author:

Porret Clement,Hikavyy Andriy Yakovitch,Gomez Granados Juan Fernando,Baudot Sylvain,Vohra Anurag,Kunert Bernardette,Douhard Bastien,Bogdanowicz Janusz,Schaekers Marc,Kohen David,Margetis Joe,Tolle John,Lima Lucas,Sammak Amir,Scappucci Giordano,Rosseel Erik,Langer Robert,Loo Roger

Publisher

The Electrochemical Society

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