A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0-Reference-Cited by-同舟云学术

A Manufacturing Grade, Porous Oxycarbosilane Spin-On Dielectric Candidate with K ≤ 2.0

Published:2011 Issue:7 Volume:158 Page:G155
ISSN:0013-4651
Container-title:Journal of The Electrochemical Society
language:en
Short-container-title:J. Electrochem. Soc.

Author:

Volksen Willi,Magbitang Teddie P.,Miller Robert D.,Purushothaman Sampath,Cohen Stephan A.,Nakagawa Hisashi,Nobe Youhei,Kokubo Terukazu,Dubois Geraud J. M.

Publisher

The Electrochemical Society

Subject

Materials Chemistry,Electrochemistry,Surfaces, Coatings and Films,Condensed Matter Physics,Renewable Energy, Sustainability and the Environment,Electronic, Optical and Magnetic Materials

Reference31 articles.

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