Author:
Chang T. C.,Yan S. T.,Liu P. T.,Chen C. W.,Wu Y. C.,Sze S. M.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference9 articles.
1. The International Technology Roadmap for Semiconductors
(ITRS), Tables 28a, 28b, SIA, San Jose, CA (1999).
2. M. H. White, Y. Yang, A. Purwar, and M. L. French, in
IEEE Int’l Nonvolatile Memory Technology Conference
, Paper 52 (1996).
3. H. E. Maes, J. Witters, and G. Groeseneken, in
Proceedings of the 17th European Solid State Devices Reseach Conference
, Bologna, Italy, 1987, p. 157 (1988).
4. S. Wolf,
Silicon Processing for the VLSI Era
, Vol. 1, 2nd ed., p. 706, Lattice Press, Sunset Beach, CA (1999).
Cited by
9 articles.
订阅此论文施引文献
订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献