Author:
Gorantla V. R. K.,Babel A.,Pandija S.,Babu S. V.
Publisher
The Electrochemical Society
Subject
Electrical and Electronic Engineering,Electrochemistry,Physical and Theoretical Chemistry,General Materials Science,General Chemical Engineering
Reference24 articles.
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Silicon Processing for the VLSI Era, Volume 1—Process Technology
, Lattice Press, CA (2001).
2. Copper interconnection integration and reliability
3. Initial study on copper CMP slurry chemistries
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