Publisher
Society of Materials Science, Japan
Subject
Mechanical Engineering,Mechanics of Materials,Condensed Matter Physics,General Materials Science
Reference12 articles.
1. 1) (社)電子情報技術産業協会Intn. Technol. Roadmap for Semiconductors (ITRS) : 2003 Ed., CD-ROM, p.41 (2004).
2. 2) K. Suzuki, N. Hirayanagi, T. Fujiwara, A. Yamada, J. Ikeda, T. Yahiro, S. Kojima, J. Udagawa, H. Yamamoto, N. Katakura, M. Suzuki, T. Aoyama, H. Takekoshi, T. Umemoto, H. Shimizu, S. Fukui, S. Suzuki, T. Okino, Y. Ohkubo, T. Shimoda, T. Tanida, Y. Watanabe, Y. Kohama, K. Ohmori, F. Mori, S. Takemoto, T. Yoshioka, H. Hirose, K. Morita, K. Hada, S. Kawata, Y. Kakizaki and T. Miura, J. Vac. Sci. and Technol. B, 22, 2885 (2004).
3. 3) M. Yoshizawa, S. Moriya, K. Oguni, H. Nakano, S. Omori, T. Kitagawa, M. Kotera and H. Niu, J. Vac. Sci. and Technol. B, 22, 3518 (2004).
4. 4) 杉原和佳, EB2004 (日経BP社), 34 (2003).
5. 5) P. Kruit and M. J. Wieland, Digest of papers, Microprocesses and Nanotechnology, 310 (2004).