Vertical-Objective-Based Ellipsometric Microscope for Real-Time Observation of nm-Thick Lubricant Films
Author:
Publisher
Japanese Society of Tribologists
Subject
Surfaces, Coatings and Films
Reference8 articles.
1. [1] Azzam, R. M. A. and Bashara, N. M., “Ellipsometry and Polarized Light,” North-Holland, Amsterdam, 1987, 153-332.
2. [2] Meeks, S. W., Weresin, W. E. and Rosen, H. J., “Optical Surface Analysis of the Head-Disk-Interface of Thin Film Disks,” ASME J. Tribol., 117, 1995, 112-118.
3. [3] Linke, F. and Merkel, R., “Quantitative Ellipsometric Microscopy at the Silicon-Air Interface,” Rev. Sci. Instrum., 76, 6, 2005, 3701-1-3701-10.
4. [4] Fukuzawa, K., Yoshida, T., Itoh, S. and Zhang, H., “Motion Picture Imaging of a Nanometer-Thick Liquid Film Dewetting by Ellipsometric Microscopy with a Sub-μm Lateral Resolution,” Langmuir, 24, 20, 2008, 11645-11650.
5. [5] Qingqing, L., Fukuzawa, K., Kajihara, Y., Zhang, H. and Itoh, S., “Development of Ellipsometric Microscope for High-Resolution Observation of Nanometer-Thick Lubricant Films,” Tribology Online, 6, 6, 2011, 251-256.
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