Affiliation:
1. IBM Research Division, Almaden Research Center, 650 Harry Road, San Jose, CA 95120-6099
Abstract
This paper describes the design, operation, theory, and data interpretation of an Optical Surface Analyzer (OSA). The OSA can measure carbon wear, lubricant depletion/accumulation, surface roughness, and lubricant alteration on carbon coated thin film disks. This device can measure an Angstrom of carbon wear or lubricant depletion/accumulation. The OSA can also measure debris generation and lubricant degradation through a measurement of optical index change. The lateral resolution of the OSA is approximately 5 by 10 microns and the bandwidth of the device is 2 MHz. The small device size allows it to be used within a test stand environment.
Subject
Surfaces, Coatings and Films,Surfaces and Interfaces,Mechanical Engineering,Mechanics of Materials
Reference13 articles.
1. Assam, R. A., and Bashara, N. M., 1976, Ellipsometry and Polarized Light, North-Holland Publishing Co., Amsterdam, The Netherlands.
2. Ba¨umgartner
H.
, and LiessH. D., 1988, “Micro Kelvin Probe for Local Work-function Measurement,” Rev. Sci. Instrum., Vol. 59, p. 802802.
3. Benninghoven, A., Rudenauer, F. G., and Werner, H. W., 1987, Secondary Ion Mass Spectrometry, Wiley, New York.
4. Bright
D. S.
, and MarinenkoR. B., 1992, “Concentration Histogram Imaging: A Quantitative View of Related Images,” Microscopy: The Key Research Tool, Vol. 22, p. 2121.
5. Butz
R.
, and WagnerH., 1977, “A Device for Measuring Contact Potential Differences with High Spatial Resolution,” Appl. Phys., Vol. 13, p. 3737.
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