Characterization of an Oxidized Porous Silicon Layer by Complex Process Using RTO and the Fabrication of CPW-Type Stubs on an OPSL for RF Application
Author:
Publisher
Wiley
Subject
Electrical and Electronic Engineering,General Computer Science,Electronic, Optical and Magnetic Materials
Reference8 articles.
1. Silicon High-Resistivity-Substrate Millimeter-Wave Technology
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2. The interior interfaces of a semiconductor/metal nanocomposite and their influence on its physical properties;physica status solidi (c);2009-10
3. Electrochemical stabilization of porous silicon multilayers for sensing various chemical compounds;Journal of Applied Physics;2006-10-15
4. Silicon Micro-probe Card Using Porous Silicon Micromachining Technology;ETRI Journal;2005-08-09
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