Evaluation of ion bombardment in DC magnetron sputtering DC-Reference-Cited by-同舟云学术

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Evaluation of ion bombardment in DC magnetron sputtering DC

Published:2015 Issue:1+2 Volume:27 Page:1-6
ISSN:0915-5651
Container-title:Journal of Advanced Science
language:en
Short-container-title:Journal of Advanced Science

Author:

TOYODA Ryoichi¹,MIYATA Shumpei¹,MATSUMURA Yoshihito¹,IIJIMA Takaaki²,TONEGAWA Akira³,TAKEUCHI Mitsuaki⁴

Affiliation:

1. Course of Applied Science, Graduate School of Engineering, Tokai University

2. Course of Science and Technology, Graduate School of Science and Technology, Tokai University

3. Department of Physics, School of Science, Tokai University

4. Photonics and Electronics Science and Engineering Center, Kyoto University

Publisher

Society of Advanced Science

Subject

General Medicine

Link

https://www.jstage.jst.go.jp/article/jsas/27/1+2/27_150401703/_pdf

Reference16 articles.

1. D. W. Hoffman and M. R. Gaerttner: J. Vac. Sci. Technol. 17 pp.425-428 (1980).

2. T. J. Vink and J. B. A. D. Van Zon: J. Vac. Sci. Technol. A 9, pp.124-127 (1991).

3. F. Schatz, M. Hirscher and M. Schnell: J. Appl. Phys. 76, pp.5380-5382 (1994).

4. R. Wolfe and J. C. North: J. Vac. Sci. Technol. 15, pp.1675-1684 (1978).

5. A. Misra, S. Fayeulle, H. Kung, T. E. Mitchel and M. Nastasi: Nucl. Instrum. Methods B 148, pp.211-215 (1999).

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