Measurement of the large area surface relief by optical interference microscope-Reference-Cited by-同舟云学术

Measurement of the large area surface relief by optical interference microscope

Published:2022-05-18 Issue:1 Volume:8 Page:66-71
ISSN:2618-981X
Container-title:Interexpo GEO-Siberia
language:
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Author:

Vykhristyuk I. A.¹,Kulikov R. V.¹,Sysoev E. V.¹

Affiliation:

1. Technological Design Institute of Scientific Instrument Engineering Siberian Branch of the Russian Academy of Sciences

Abstract

It was presented the procedure of stitching surface regions measured by optical interference microscope to get a microrelief of large area. It was shown that usage of that procedure allows to perform measurements which are difficult at the processing of measured surface regions separately. Measurement results and stitching are presented.

Publisher

Siberian State University of Geosystems and Technologies

Subject

Industrial and Manufacturing Engineering

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