Destruction of hexafluoroethane in a dielectric-packed bed plasma reactor
Author:
Publisher
Zhejiang University Press
Subject
General Engineering
Link
http://link.springer.com/content/pdf/10.1631/jzus.A0900734.pdf
Reference22 articles.
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3. Chen, H.L., Lee, H.M., Cheng, L.C., Chang, M.B., Yu, S.J., Li, S.N., 2008. Influence of nonthermal plasma reactor type on CF4 and SF6 abatements. IEEE Transactions on Plasma Science, 36(2):509–515. [doi:10.1109/TPS.2008.918675]
4. Delattre, J.L., Friedman, T.L., Stacy, A.M., 1999. Destructive abatement of CF4 and C2F6 via a plasma induced reaction with CaO. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures, 17(6):2664–2666. [doi:10.1116/1.591044]
5. Futamura, S., Sugasawa, M., 2008. Mechanisms for formation of organic and inorganic by-products and their control in nonthermal plasma chemical processing of VOCs. International Journal of Environment and Waste Management, 2(4/5):471–483. [doi:10.1504/IJEWM.2008.021787]
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1. Atmospheric pressure plasma of C 2 F 6 /N 2 for the decomposition of C 2 F 6 in a dielectric barrier discharge;Journal of Industrial and Engineering Chemistry;2018-01
2. Decomposition of Sulfur Hexafluoride by Using a Nonthermal Plasma-assisted Catalytic Process;Journal of the Korean Physical Society;2011-12-15
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