An Atmospheric-Pressure Plasma Process for C2F6 Removal-Reference-Cited by-同舟云学术

An Atmospheric-Pressure Plasma Process for C2F6 Removal

Published:2001-03-14 Issue:8 Volume:35 Page:1587-1592
ISSN:0013-936X
Container-title:Environmental Science & Technology
language:en
Short-container-title:Environ. Sci. Technol.

Author:

Chang Moo Been¹,Yu Sheng Jen¹

Affiliation:

1. Graduate Institute of Environmental Engineering, National Central University, Chungli 320, Taiwan, R.O.C.

Publisher

American Chemical Society (ACS)

Subject

Environmental Chemistry,General Chemistry

Link

https://pubs.acs.org/doi/pdf/10.1021/es001556p

Reference14 articles.

1. Houghton, J. T.; Meira Filho, L. G.; Callander, B. A.; Harris, N.; Kattenberg, A.; Maskell, K.Climate Change 1995-The Science of Climate Change, 1st ed.; Cambridge University Press: New York, 1996; p 121.

2. Innovative Surface Wave Plasma Reactor Technique for PFC Abatement

3. Surface Wave Plasma Abatement of CHF3 and CF4 Containing Semiconductor Process Emissions

4. A Carbon Arc Process for Treatment of CF4 Emissions

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