Reflectivity Control at Substrate / Photoresist Interface by Inorganic Bottom Anti-Reflection Coating for Nanometer-scaled Devices-Reference-Cited by-同舟云学术

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Reflectivity Control at Substrate / Photoresist Interface by Inorganic Bottom Anti-Reflection Coating for Nanometer-scaled Devices

Published:2014-06-25 Issue:3 Volume:15 Page:159-163
ISSN:1229-7607
Container-title:Transactions on Electrical and Electronic Materials
language:en
Short-container-title:Transactions on Electrical and Electronic Materials

Author:

Kim Sang-Yong,Kim Yong-Sik

Publisher

The Korean Institute of Electrical and Electronic Material Engineers

Subject

Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials

Link

http://ocean.kisti.re.kr/downfile/crosscheck/kieeme/JAKO201418342937915.pdf

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. ВЛИЯНИЕ КАТАЛИЗАТОРА ТЕРМООТВЕРЖДЕНИЯ В АНТИОТРАЖАЮЩЕМ ПОКРЫТИИ НА ПРОФИЛЬ ЭЛЕМЕНТОВ ФОТОРЕЗИСТА, "Электронная техника. Серия 3. Микроэлектроника";Электронная техника. Серия 3. Микроэлектроника;2021

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