Development of Damage-free Figuring and Finishing Techniques for Ceramics Materials by Utilizing Reactive Plasma-Reference-Cited by-同舟云学术

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Development of Damage-free Figuring and Finishing Techniques for Ceramics Materials by Utilizing Reactive Plasma

Published:2018-10-15 Issue:10 Volume:65 Page:654-658
ISSN:0532-8799
Container-title:Journal of the Japan Society of Powder and Powder Metallurgy
language:en
Short-container-title:J. Jpn. Soc. Powder Powder Metallurgy

Author:

YAMAMURA Kazuya¹

Affiliation:

1. Division of Precision Science & Technology and Applied Physics, Graduate School of Engineering, Osaka University

Publisher

Japan Society of Powder and Powder Metallurgy

Subject

Materials Chemistry,Metals and Alloys,Industrial and Manufacturing Engineering,Mechanical Engineering

Link

https://www.jstage.jst.go.jp/article/jjspm/65/10/65_654/_pdf

Reference14 articles.

1. 1) Y. Mori, K. Yamamura, K. Yamauchi, K. Yoshii, T. Kataoka, K. Endo, K. Inagaki and H. Kakiuchi: Nanotechnology, 4 (1993) 225-229.

2. 2) Y. Mori, K. Yamauchi, K. Yamamura,Y. Sano: Rev. Sci. Instrum., 71 (2000) 4627-4632.

3. 3) K. Yamamura, K. Yamauchi, H. Mimura, Y. Sano, A. Saito, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku, T. Ishikawa, Y. Mori: Rev. Sci. Instrum., 74 (2003) 4549-4553.

4. 4) Y. Mori, K. Yamamura, Y. Sano: Rev. Sci. Instrum., 75 (2004) 942-946.

5. 5) Y. Sano, K. Yamamura, H. Mimura, K. Yamauchi, Y. Mori: Rev. Sci. Instrum., 78 (2007) 086102.

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