Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques-Reference-Cited by-同舟云学术

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Optical and mechanical properties of oxide UV coatings, prepared by PVD techniques

Published:2011-09-22 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Stenzel Olaf,Schürmann Mark,Wilbrandt Steffen,Kaiser Norbert,Tünnermann Andreas,Mende Mathias,Ehlers Henrik,Ristau Detlev,Bruns Stefan,Vergöhl Michael,Riggers Werner,Bischoff Martin,Held Mario

Publisher

SPIE

Cited by 7 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Re-engineering of optical constants and layer thicknesses from in situ broadband monitoring: an oscillator model approach;Optics Continuum;2022-04-12

2. Plasma-Enhanced Atomic Layer Deposition of HfO₂ with Substrate Biasing: Thin Films for High-Reflective Mirrors;ACS Applied Materials & Interfaces;2022-03-21

3. Influence of temperature and plasma parameters on the properties of PEALD HfO2;Optical Materials Express;2021-06-07

4. Progress on optical coatings deposited with dual rotatable magnetrons in a sputter up system;Surface and Coatings Technology;2014-02

5. Postdeposition treatment of IBS coatings for UV applications with optimized thin-film stress properties;Applied Optics;2014-01-03

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