1. Institute of Applied Physics, Friedrich Schiller University Jena, Albert-Einstein Str. 15, 07745 Jena, Germany
2. Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Str. 7, 07745 Jena, Germany
3. Department of Applied Physics, Eindhoven University of Technology, P.O. Box 513, 5600 MB Eindhoven, The Netherlands
4. Layertec GmbH, Ernst-Abbe-Weg 1, 99441 Mellingen, Germany
5. Leibniz-Institute of Photonic Technology, Albert-Einstein-Str. 9, 07745 Jena, Germany
6. RhySearch, Werdenbergstrasse 4, 9471 Buchs, Switzerland
7. Institute of Solid State Physics, Friedrich Schiller University Jena, Helmholtzweg 5, 07743 Jena, Germany
8. Sentech Instruments GmbH, Schwarzschildstraße 2, 12489 Berlin, Germany