EUV-LET 2.0: a compact exposure tool for industrial research at a wavelength of 13.5nm
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SPIE
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1. Development of an ultra-compact inline transmission grating spectrograph for extreme ultraviolet wavelengths;International Conference on Extreme Ultraviolet Lithography 2023;2023-11-21
2. Towards the resolution limit of Talbot lithography with compact EUV exposure tools;International Conference on Extreme Ultraviolet Lithography 2022;2022-12-01
3. Design of an efficient illuminator for partially coherent sources in the extreme ultraviolet;Applied Optics;2022-04-04
4. Design and realization of an in-lab EUV dual beamline for industrial and scientific applications;International Conference on Extreme Ultraviolet Lithography 2021;2021-10-13
5. EUV scattering from carbon nanotube pellicles: measurement and control;Journal of Micro/Nanopatterning, Materials, and Metrology;2021-06-08
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