Author:
Dixson Ronald,Guerry Angela
Cited by
38 articles.
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1. Toward realization of high-throughput hyperspectral imaging technique for semiconductor device metrology;Journal of Micro/Nanopatterning, Materials, and Metrology;2022-04-20
2. Novel dual-probes atomic force microscope for line width measurements;LIDAR Imaging Detection and Target Recognition 2017;2017-11-15
3. Advances in the atomic force microscopy for critical dimension metrology;Measurement Science and Technology;2016-11-18
4. Helium ion beam induced growth of hammerhead AFM probes;Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena;2015-11
5. Effects of lateral tip control in CD-AFM width metrology;Measurement Science and Technology;2014-08-12