Helium ion beam induced growth of hammerhead AFM probes-Reference-Cited by-同舟云学术

Helium ion beam induced growth of hammerhead AFM probes

Published:2015-11 Issue:6 Volume:33 Page:06F503
ISSN:2166-2746
Container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
language:en
Short-container-title:Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Author:

Nanda Gaurav¹,van Veldhoven Emile²,Maas Diederik²,Sadeghian Hamed³,Alkemade Paul F. A.¹

Affiliation:

1. Kavli Institute of Nanoscience, Delft University of Technology, Lorentzweg 1, 2628 CJ Delft, The Netherlands

2. TNO Science and Industry, Stieltjesweg 1, 2628 CK Delft, The Netherlands

3. TNO Science and Industry, Stieltjesweg 1, 2628 CK Delft, The Netherlands and Department of Precision and Microsystems Engineering, Delft University of Technology, 2628 CJ Delft, The Netherlands

Funder

Dutch Technology Foundation STW

Ministry of Economic Affairs

Publisher

American Vacuum Society

Subject

Materials Chemistry,Electrical and Electronic Engineering,Surfaces, Coatings and Films,Process Chemistry and Technology,Instrumentation,Electronic, Optical and Magnetic Materials

Link

http://avs.scitation.org/doi/pdf/10.1116/1.4936068

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