Low-power multi-scan patterns capable 3D-constructed piezoelectric MEMS mirrors
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SPIE
Reference19 articles.
1. MEMS Laser Scanners: A Review
2. A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection
3. 5 V Compatible Two-Axis PZT Driven MEMS Scanning Mirror with Mechanical Leverage Structure for Miniature LiDAR Application
4. Single-Crystal PMN-PT-Laminated Piezoelectric Scanning Micromirror for Laser Beam Scanning Applications
5. Two-Axis Electromagnetic Microscanner for High Resolution Displays
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. AlScN-based quasi-static multi-degree-of-freedom piezoelectric MEMS micromirror with large mirror plate and high fill factor;Sensors and Actuators A: Physical;2024-12
2. Design of a 2-DOF scanning mirror using flexible membrane and electromagnetic actuators;Microsystem Technologies;2024-05-20
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