Through-focus scanning optical microscopy applications
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Publisher
SPIE
Reference47 articles.
1. Optical illumination and critical dimension analysis using the through-focus focus metric method - art. no. 62890Q;Attota,2006
2. Through-focus scanning-optical-microscope imaging method for nanoscale dimensional analysis
3. TSOM method for semiconductor metrology
4. Through-focus Scanning Optical Microscopy;Attota,2011
5. Nanometrology using a through-focus scanning optical microscopy method
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1. One-shot TSOM with a multi-task learning model for simultaneous dimension measurement and defect inspection;Optics and Lasers in Engineering;2024-10
2. High-Temperature Materials for Complex Components in Ammonia/Hydrogen Gas Turbines: A Critical Review;Energies;2023-10-06
3. Enhancing 6 nm CD Patterned Defect Classification with TSOM and CNNs;2023 34th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC);2023-05-01
4. Focused and TSOM Images Two-Input Deep-Learning Method for Through-Focus Scanning Measuring;Applied Sciences;2022-03-28
5. Defect height estimation via model-less TSOM under optical resolution;Optics Express;2021-08-10
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