E-beam simulation for advanced SEM applications in semiconductor industry-Reference-Cited by-同舟云学术

登录注册会员服务联系我们

E-beam simulation for advanced SEM applications in semiconductor industry

Published:2024-04-10 Issue: Volume:8681 Page:51
ISSN:
Container-title:Metrology, Inspection, and Process Control XXXVIII
language:
Short-container-title:

Author:

Cheon Wooyoung,Moon Taejin,Kwon In,Lee Jinwoo,Lee Jaeyong,Kwon Yongjae,Ramu Ashok,Jin Seonghoon,Yukihide Tsuji,Chae Hyunwoo,Park Chulwoo,Choi Hyunsuk,Lee Kwangseok,Ahn Byungseong,Yang Jaehun,Ma Ami,Kim Qhwan,Im Donghyeok,Bae Jaehyun,Sun Jongcheon,Lee Su-Young,Yi Shinwook,Doh Jiseong,Chang Kyu Baik,Han Songyi,Jeong Jaehoon,Yang Yusin,Kim Dae Sin

Publisher

SPIE

Reference11 articles.

1. Metrology for the next generation of semiconductor devices

2. CHARIOT: Software tool for modeling SEM signal and e-beam lithography

3. Nebula: Monte Carlo simulator of electron–matter interaction

4. TCAD challenges and opportunities to find a feasible device architecture for sub-3nm scaling;Kwon;IEEE SISPAD,2021

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370

www.globalauthorid.com

TOP