Author:
Fujii Toru,Suzuki Kosuke,Mizuno Yasushi,Kita Naonori
Cited by
15 articles.
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1. Wavefront measurements using the Ronchi test for high-NA lithography projection lenses;Applied Optics;2023-06-21
2. Distortion Detection of Lithographic Projection Lenses Based on Wavefront Measurement;Photonics;2023-02-04
3. Polarization aberration in-situ measurement in lithography tools;10th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced and Extreme Micro-Nano Manufacturing Technologies;2021-12-13
4. Non-paraxial diffraction of tiny pinhole illuminated by partially coherent light;9th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Micro- and Nano-Optics, Catenary Optics, and Subwavelength Electromagnetics;2019-01-24
5. Analysis of the pinhole array illumination source for high precision wavefront error metrology;SPIE Proceedings;2015-08-07