Sensitivity analysis for high accuracy proximity effect correction

Author:

Thrun Xaver,Browning Clyde,Choi Kang-Hoon,Figueiro Thiago,Hohle Christoph,Saib Mohamed,Schiavone Patrick,Bartha Johann W.

Publisher

SPIE

Reference7 articles.

1. A. Saltelli, S. Tarantola, F. Campolongo, and M. Ratto, Sensitivity Analysis in Practice: A Guide to Assessing Scientific Models, Wiley, Feb. 2004.

2. “International technology roadmap for semiconductors 2013,” ITRS Reports’ Summaries Lithography, 2013. http://www.itrs.net/ITRS%201999–2014%20Mtgs,%20Presentations%20&%20Links/2013ITRS/2013Chapters/2013Litho_Summary.pdf.

3. PSF calibration patterns selection based on sensitivity analysis

4. Sensitivity analysis for accurate determination of PSF parameters

5. Sensitivity Analysis for Chemical Models

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