Interferometric measuring systems of nanopositioning and nanomeasuring machines

Author:

Hausotte Tino

Publisher

SPIE

Reference16 articles.

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2. Hausotte, T., [Nanopositionier- und Nanomessmaschine], ISLE Verlag (2002). Dissertation.

3. Nanopositioning and nanomeasuring machine NPMM-200—a new powerful tool for large-range micro- and nanotechnology

4. Balzer, F. G., [Entwicklung und Untersuchungen zur 3-D-Nanopositioniertechnik in großen Bewegungsbereichen], Univ.-Verl. Ilmenau (2015). Dissertation.

5. Tactile 3D microprobe system with exchangeable styli

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