Author:
Lutzenberger B. Jeffrey,Dickensheets David L.
Cited by
2 articles.
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1. Mass reduction patterning of silicon-on-oxide–based micromirrors;Journal of Micro/Nanolithography, MEMS, and MOEMS;2016-12-20
2. Periodic rib-reinforced silicon nitride scan mirrors;IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.;2005