Spectral measurement of ultra line-narrowed F 2 laser-Reference-Cited by-同舟云学术

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Spectral measurement of ultra line-narrowed F 2 laser

Published:2001-09-14 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Wakabayashi Osamu,Sakuma Jun,Suzuki Toru,Kubo Hirokazu,Kitatochi Naoki,Suganuma Takashi,Nakaike Takanori,Kumazaki Takahito,Hotta Kazuaki,Mizoguchi Hakaru,Nakao Kiyoharu,Togashi Tadashi,Nabekawa Yasuo,Watanabe Shuntaro

Publisher

SPIE

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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3. Ultra line narrowed injection lock laser light source for higher NA ArF immersion lithography tool;SPIE Proceedings;2007-03-16

4. Spectral dynamics analysis of utlra-line-narrowed F 2 laser;SPIE Proceedings;2003-06-25

5. Development of a 5-kHz ultra-line-narrowed F 2 laser for dioptric projection systems;SPIE Proceedings;2002-07-15

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