The mid and low-spatial frequency error control technology research during the process with ion-beam figuring in large aperture standard mirror-Reference-Cited by-同舟云学术

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The mid and low-spatial frequency error control technology research during the process with ion-beam figuring in large aperture standard mirror

Published:2019-05-10 Issue: Volume: Page:
ISSN:
Container-title:Second Symposium on Novel Technology of X-Ray Imaging
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Author:

Zhu Heng,Li Zhi Gang,Bao Zhen Jun,Cai Hong Mei,Yan Ding Yao,Ma Ping

Publisher

SPIE

Reference12 articles.

1. Algorithm for ion beam figuring of low-gradient mirrors;Changjun;Applied Optics,2009

2. Ion beam figuring for lithography optics

3. Ion beam figuring machine for ultra-precision silicon spheres correction

4. Manufacturing of aspherical optics by ion beam and measuring technique;Médart*,2006

5. “Polishing an off-axis aspheric mirror by ion beam figuring,” Proc. of SPIE Vol. 9683, 96830H,(2016).

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