New operational mode of the pencil beam interferometry based LTP

Author:

Centers Gary1,Smith Brian V.1,Yashchuk Valeriy V.1

Affiliation:

1. Lawrence Berkeley National Lab. (United States)

Publisher

SPIE

Reference38 articles.

1. M. Idir and V. V. Yashchuk, Co-Chairs, “Optical and X-ray metrology,” in: X-ray Optics for BES Light Source Facilities, Report of the Basic Energy Sciences Workshop on X-ray Optics for BES Light Source Facilities, D. Mills and H. Padmore, Co-Chairs, pp. 44-55, U.S. Department of Energy, Office of Science, Potomac, MD (March 27-29, 2013); .

2. X-ray optics metrology;Takacs,2009

3. Use of an optical profiling instrument for the measurement of the figure and finish of optical quality surfaces

4. Design of a long trace surface profiler;Takacs,1987

5. Using a straightness reference in obtaining more accurate surface profiles from a long trace profiler

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