Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors-Reference-Cited by-同舟云学术

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Transfer of autocollimator calibration for use with scanning gantry profilometers for accurate determination of surface slope and curvature of state-of-the-art x-ray mirrors

Published:2019-10-02 Issue: Volume: Page:
ISSN:
Container-title:Advances in Metrology for X-Ray and EUV Optics VIII
language:
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Author:

Lacey Ian,Anderson Kevan,Dickert Jeff M.,Geckeler Ralf D.,Just Andreas,Siewert Frank,Smith Brian V.,Yashchuk Valeriy V.

Publisher

SPIE

Reference69 articles.

1. Requirements on hard x-ray grazing incidence optics for European XFEL: analysis and simulation of wavefront transformations

2. Recent Developments in UV Optics for Ultra-Short, Ultra-Intense Coherent Light Sources

3. ALS-U, https://als.lbl.gov/als-u/.

4. ALS-U: Solving Scientific Challenges with Coherent Soft X-Rays;Kevan,2017

5. Pencil Beam Interferometer For Aspherical Optical Surfaces

Cited by 4 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Characterized environmental influences on autocollimator measurement uncertainty using an extended Allan variance;Optics and Lasers in Engineering;2024-01

2. Multi-pitch nano-accuracy surface profiler for strongly curved X-ray mirror metrology;Optics and Lasers in Engineering;2023-03

3. A comparison of traceable spatial angle autocollimator calibrations performed by PTB and VTT MIKES;Metrologia;2021-12-13

4. Investigation on lateral resolution of surface slope profilers;Advances in Metrology for X-Ray and EUV Optics VIII;2019-09-09

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