Large surface profile measurement with instantaneous phase-shifting interferometry
Author:
Publisher
SPIE-Intl Soc Optical Eng
Subject
General Engineering,Atomic and Molecular Physics, and Optics
Reference17 articles.
1. Instantaneous phase shifting arrangement for microsurface profiling of flat surfaces
2. Optical roughness measurements using extended white-light interferometry
3. Simultaneous phase-shift interferometer
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