Publisher
SPIE-Intl Soc Optical Eng
Subject
Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials
Cited by
3 articles.
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1. Stability studies on a sensitive EUV photoresist based on zinc metal oxoclusters;Journal of Micro/Nanolithography, MEMS, and MOEMS;2019-11-09
2. Contribution of EUV mask CD variability on LCDU;SPIE Proceedings;2017-03-24
3. Introduction;Design for Manufacturability with Advanced Lithography;2016