Study of a grating interferometer with high optical subdivision technique
Author:
Affiliation:
1. Shanghai Institute of Optics and Fine Mechanics (China)
Publisher
SPIE
Reference20 articles.
1. A novel high speed/high precision displacement measurement method using double grating scales for a macro/micro driven system: Principle design and experimental verification;Jie,2006
2. Wavelength-modulated fiber optic sensor for high precision displacement measurement
3. High stability interleaved fiber Michelson interferometer for on-line precision displacement measurements
4. Heterodyne interferometric system with subnanometer accuracy for measurement of straightness
5. Accelerometer shock calibration using differential grating laser interferometer from 100m/s(2) to 1,000,000m/s(2);Lian,1998
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3. Displacement measuring grating interferometer: a review;Frontiers of Information Technology & Electronic Engineering;2019-05
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