Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations-Reference-Cited by-同舟云学术

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Demonstrating the benefits of source-mask optimization and enabling technologies through experiment and simulations

Published:2010-03-11 Issue: Volume: Page:
ISSN:0277-786X
Container-title:SPIE Proceedings
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Author:

Melville David,Rosenbluth Alan E.,Tian Kehan,Lai Kafai,Bagheri Saeed,Tirapu-Azpiroz Jaione,Meiring Jason,Halle Scott,McIntyre Greg,Faure Tom,Corliss Daniel,Krasnoperova Azalia,Zhuang Lei,Strenski Phil,Waechter Andreas,Ladanyi Laszlo,Barahona Francisco,Scarpazza Daniele,Lee Jon,Inoue Tadanobu,Sakamoto Masaharu,Muta Hidemasa,Wagner Alfred,Burr Geoffrey,Kim Young,Gallagher Emily,Hibbs Mike,Tritchkov Alexander,Granik Yuri,Fakhry Moutaz,Adam Kostas,Berger Gabriel,Lam Michael,Dave Aasutosh,Cobb Nick

Publisher

SPIE

Cited by 25 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

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