Low-temperature piezoelectric aluminum nitride thin film
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SPIE
Cited by 5 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Carbon attachment on the aluminum nitride gate dielectric in the pentacene-based organic thin-film transistors;Journal of Applied Physics;2009-03-15
2. Methane Exposure on the Aluminum Nitride Gate Dielectric in Pentacene-Based Organic Thin-Film Transistors;Electrochemical and Solid-State Letters;2009
3. Low-voltage organic thin film transistors with hydrophobic aluminum nitride film as gate insulator;Organic Electronics;2007-08
4. Organic Thin-Film Transistors with Low-Temperature AlN Film as Gate Insulator;Electrochemical and Solid-State Letters;2007
5. Piezoelectric aluminum nitride thin films for ultrasonic transducers;MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication;2001-10-01
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