Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2-Reference-Cited by-同舟云学术

Design and fabrication of a MEMS-based gas sensor containing WO3 sensitive layer for detection of NO2

Published:2017-01-06 Issue:1 Volume:16 Page:015002
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Wang Chengyang¹,Jin Jiandong¹,Li Yuling¹,Ding Wenbo¹,Dai Mingjun²

Affiliation:

1. China Electronics Technology Group Corporation, No. 49 Research Institute, Yiman Street, No. 29, Harbin 150001, China

2. Jilin University, College of Electronic Science and Engineering, Qianjindajie Street, No. 2699, Changchun 130012, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference34 articles.

1. Recent developments in semiconducting thin-film gas sensors

2. Nanosheets assembled hierarchical flower-like WO3 nanostructures: Synthesis, characterization, and their gas sensing properties

3. An innovative gas sensor incorporating ZnO–CuO nanoflakes in planar MEMS technology

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