Nanofabrication and characterization of high-line-density x-ray transmission gratings-Reference-Cited by-同舟云学术

Nanofabrication and characterization of high-line-density x-ray transmission gratings

Published:2017-08-19 Issue:03 Volume:16 Page:1
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Zhu Xiaoli¹,Li Hailiang¹,Cao Leifeng²,Liu Shenye²,Shi Peixiong³,Xie Changqing¹

Affiliation:

1. Institute of Microelectronics of Chinese Academy of Sciences, Key Laboratory of Microelectronic Devi

2. China Academy of Engineering, Research Center of Laser Fusion, National Key Laboratory of Laser Fusi

3. Technical University of Denmark, Danchip-Cen, National Center for Micro- and Nanofabrication, Kgs Ly

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference60 articles.

1. First high-resolution Chandra LETGS spectrum of the transient supersoft X-ray source RX J0513.9-6951

2. Extreme-ultraviolet efficiency measurements of freestanding transmission gratings

3. Subnanoradian X-ray phase-contrast imaging using a far-field interferometer of nanometric phase gratings

4. Phase retrieval and differential phase-contrast imaging with low-brilliance X-ray sources

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