Numerical study on response time of a parallel plate capacitive polyimide humidity sensor based on microhole upper electrode-Reference-Cited by-同舟云学术

Numerical study on response time of a parallel plate capacitive polyimide humidity sensor based on microhole upper electrode

Published:2017-08-04 Issue:3 Volume:16 Page:034502
ISSN:1932-5150
Container-title:Journal of Micro/Nanolithography, MEMS, and MOEMS
language:en
Short-container-title:J. Micro/Nanolith. MEMS MOEMS

Author:

Zhou Wenhe¹,He Xuan²,Wu Jianyun²,Wang Liangbi³,Wang Liangcheng⁴

Affiliation:

1. Lanzhou Jiaotong University, School of Environmental and Municipal Engineering, Lanzhou, ChinabKey Laboratory of Railway Vehicle Thermal Engineering of Ministry of Education, Lanzhou, China

2. Lanzhou Jiaotong University, School of Environmental and Municipal Engineering, Lanzhou, China

3. Key Laboratory of Railway Vehicle Thermal Engineering of Ministry of Education, Lanzhou, ChinacLanzhou Jiaotong University, School of Mechatronic Engineering, Lanzhou, Gansu, China

4. Key Laboratory of Railway Vehicle Thermal Engineering of Ministry of Education, Lanzhou, ChinadLanzhou Jiaotong University, School of Chemical and Biological Engineering, Lanzhou, China

Publisher

SPIE-Intl Soc Optical Eng

Subject

Electrical and Electronic Engineering,Mechanical Engineering,Condensed Matter Physics,Atomic and Molecular Physics, and Optics,Electronic, Optical and Magnetic Materials

Reference20 articles.

1. A micromachined resistive-type humidity sensor with a composite material as sensitive film

2. MEMS-based humidity sensor with integrated temperature compensation mechanism

3. Fast response resistive humidity sensitivity of polyimide/multiwall carbon nanotube composite films

4. Application of humidity sensors and an interactive device

5. Fast response humidity sensors for a medical microsystem

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