A Micro Capacitive Humidity Sensor Based on Al-Mo Electrodes and Polyimide Film

Author:

Zhou Wenhe12,Wei Jiafeng1,Wang Liangbi23

Affiliation:

1. School of Environmental & Municipal Engineering, Lanzhou Jiaotong University, Lanzhou 730070, China

2. Key Lab. of Railway Vehicle Thermal Engineering of Ministry of Education, Lanzhou 730070, China

3. School of Mechatronic Engineering, Lanzhou Jiaotong University, Lanzhou 730070, China

Abstract

Quickly sensing humidity changes is required in some fields, such as in fuel cell vehicles. The micro humidity sensor used for the relative humidity (RH) measurement with fast response characteristics, and its numerical model and method are rare. This paper firstly presents a numerical model and method for a parallel plate capacitor and a numerical analysis of its dynamic characteristics. The fabrication of this sensor was carried out based on the numerical results, and, the main characteristics of its moisture-sensitive element are shown. This parallel plate capacitor is made using complementary metal-oxide semiconductor (CMOS)-compatible technology, with a P-type monocrystalline silicon wafer used as the substrate, a thin polyimide film (PI) between the upper grid electrode and the lower parallel plate electrode, and electrodes with a molybdenum–aluminum bilayer structure. The shape of the micro sensor is square with 3 mm on the side of the source field. The humidity sensor has a linearity of 0.9965, hysteresis at 7.408% RH, and a sensitivity of 0.4264 pF/%RH. The sensor displays an average adsorption time of 1 s and a minimum adsorption time of 850 ms when the relative humidity increases from 33.2% RH to 75.8% RH. The sensor demonstrates very good stability during a 240 h test in a 25 °C environment. The numerical model and method provided by this study are very useful for predicting the performance of a parallel plate capacitor.

Funder

National Natural Science Foundation of China

Publisher

MDPI AG

Reference21 articles.

Cited by 1 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

同舟云学术

1.学者识别学者识别

2.学术分析学术分析

3.人才评估人才评估

"同舟云学术"是以全球学者为主线,采集、加工和组织学术论文而形成的新型学术文献查询和分析系统,可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容,当前同舟云学术共收录了国内外主流学术期刊6万余种,收集的期刊论文及会议论文总量共计约1.5亿篇,并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询!咨询电话:010-8811{复制后删除}0370

www.globalauthorid.com

TOP

Copyright © 2019-2024 北京同舟云网络信息技术有限公司
京公网安备11010802033243号  京ICP备18003416号-3