Laterally movable gate FET (LMGFET) for on-chip integration of MEMS with electronics
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SPIE
Cited by 7 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献
1. A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure;Engineering;2023-02
2. A CMOS-MEMS Accelerometer With U-Channel Suspended Gate SOI FET;IEEE Sensors Journal;2021-05-01
3. The Design and Analysis of a Novel Micro Force Sensor Based on Depletion Type Movable Gate Field Effect Transistor;Journal of Microelectromechanical Systems;2019-04
4. Applications of LIGA technology to precision manufacturing of high-aspect-ratio micro-components and -systems: a review;Microelectronics Journal;2004-02
5. Polymer- and carbon nanotube-based MEMS accelerometer with modified organic electronics and thin film transistor;SPIE Proceedings;2003-07-24
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