1. Method and apparatus of calibrating multi-position SLM elements;Sandström,2002
2. High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications;Schmidt,2014
3. Photoactivation and optogenetics with micro mirror enhanced illumination;Rückerl,2014
4. Technology development of diffractive micromirror arrays for the deep ultraviolet to the near infrared spectral range;Schmidt,2010
5. Large scale, drift free monocrystalline silicon micromirror arrays made by wafer bonding;Bakke,2006