Spatially resolved scatter measurement of diffractive micromirror arrays-Reference-Cited by-同舟云学术

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Spatially resolved scatter measurement of diffractive micromirror arrays

Published:2016-06-01 Issue:16 Volume:55 Page:4467
ISSN:0003-6935
Container-title:Applied Optics
language:en
Short-container-title:Appl. Opt.

Author:

Sicker Cornelius,Heber Jörg,Berndt Dirk

Funder

Fraunhofer-Gesellschaft (Germany)

Agence Nationale de la Recherche (ANR, France)

Federal Ministry of Education and Research (BMBF, Germany)

Publisher

The Optical Society

Reference24 articles.

1. Current status of optical maskless lithography

2. Gray scaling in high performance optical pattern generators

3. Sigma7500: an improved DUV laser pattern generator addressing sub-100-nm photomask accuracy and productivity requirements

4. High-speed one-dimensional spatial light modulator for Laser Direct Imaging and other patterning applications

5. MEMS analog light processing: an enabling technology for adaptive optical phase control

Cited by 1 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Modulating complex beams in amplitude and phase using fast tilt-micromirror arrays and phase masks;Optics Letters;2018-06-12

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